Sensitivity of thin-film bulk acoustic resonators (FBAR) to localized mechanical forces

Author： Campanella H.   Camargo C.J.   Esteve J.   Tsai J.M.  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65024-65032

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