Author: Phan Dinh-Tuan Yang Chun Nguyen Nam-Trung
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|11|115019-115025
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.11, 2015-11, pp. : 115019-115025
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