A semi-analytical modeling approach for laterally-vibrating thin-film piezoelectric-on-silicon micromechanical resonators

Author： Tu Cheng Lee Joshua E-Y

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|11|115020-115031

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.11, 2015-11, pp. : 115020-115031

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