Plasma inhomogeneities near the electrodes of a capacitively-coupled radio-frequency discharge containing dust particles

Author: Tawidian H.   Mikikian M.   Couëdel L.   Lecas T.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|56|2|24018-24018

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.56, Iss.2, 2011-10, pp. : 24018-24018

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract