Control of Dual Frequency Capacitively Coupled Plasma via blocking capacitor and phase angle

Author： Boudghene Stambouli Arslane   Benallal Rafik   Oudini Nourredine   Mesli Sidi Mohamed   Tadjine Rabah  

Publisher： Edp Sciences

E-ISSN： 1286-0050|80|1|10802-10802

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.80, Iss.1, 2017-10, pp. : 10802-10802

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