Characterization and optimization of ion implantation for high spatial resolution quantum well intermixing in GaAs/AlGaAs superlattices

Author： Younis Usman Holmes Barry M. Hutchings David C.

Publisher： Edp Sciences

E-ISSN： 1286-0050|66|1|10101-10101

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.66, Iss.1, 2014-04, pp. : 10101-10101

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