Evolution of high aspect ratio and nano-grass structures using a modified low plasma density reactive ion etching

Author： Mehran M.   Kolahdouz Z.   Sanaee Z.   Azimi S.   Mohajerzadeh S.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|55|1|11302-11302

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.55, Iss.1, 2011-07, pp. : 11302-11302

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Etching of low-k materials in high density fluorocarbon plasma*

By Eon D.   Raballand V.   Cartry G.   Peignon-Fernandez M.-C.   Cardinaud Ch.  

EPJ Applied Physics (The), Vol. 28, Iss. 3, 2004-11 ,pp. : 331-337

Edp Sciences

Access to resources Recommend Favorite

Reactive Ion Etching Process of Micro Mechanical Pendulum

By  

MATEC Web of conference, Vol. 95, Iss. issue, 2017-02 ,pp. : 07024-07024

Edp Sciences

Access to resources Recommend Favorite

Micro-texturing into DLC/diamond coated molds and dies via high density oxygen plasma etching

By Yunata Ersyzario Edo   Aizawa Tatsuhiko  

Manufacturing Review, Vol. 2, Iss. issue, 2015-07 ,pp. : 13-13

Edp Sciences

Access to resources Recommend Favorite

Optimization of reactive-ion etching (RIE) parameters for fabrication of tantalum pentoxide (Ta2O5) waveguide using Taguchi method

By Muttalib M. Firdaus A.  

EPJ Web of Conference, Vol. 162, Iss. issue, 2017-11 ,pp. : 01003-01003

Edp Sciences

Access to resources Recommend Favorite

Evolution of ZnO nanoparticles and nanorods: aspect ratio dependent optoelectronic properties

By Das U.   Mohanta D.  

EPJ Applied Physics (The), Vol. 53, Iss. 1, 2010-12 ,pp. : 10602-10602

Edp Sciences

Access to resources Recommend Favorite