Oxydation catalytique du silicium : l'obtention de couches d'oxydesuniformes
Publisher: Edp Sciences
E-ISSN: 1764-7177|07|C6|C6-127-C6-135
ISSN: 1155-4339
Source: Le Journal de Physique IV, Vol.07, Iss.C6, 1997-12, pp. : C6-127-C6-135
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