Oxydation catalytique du silicium : l'obtention de couches d'oxydesuniformes

Publisher: Edp Sciences

E-ISSN: 1764-7177|07|C6|C6-127-C6-135

ISSN: 1155-4339

Source: Le Journal de Physique IV, Vol.07, Iss.C6, 1997-12, pp. : C6-127-C6-135

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next