Origine et nature de la contamination involontaire des couches de silicium épitaxique sur substrat corindon (Al2o3-α)

Publisher: Edp Sciences

E-ISSN: 0035-1687|3|2|127-130

ISSN: 0035-1687

Source: Revue de Physique Appliquée (Paris), Vol.3, Iss.2, 1968-06, pp. : 127-130

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