INFLUENCE OF THE FABRICATION CONDITIONS ON THE p+-TaSi2/POLY-Si GATE QUALITY

Publisher： Edp Sciences

E-ISSN： 0449-1947|49|C4|C4-405-C4-408

ISSN： 0449-1947

Source： Le Journal de Physique Colloques, Vol.49, Iss.C4, 1988-09, pp. : C4-405-C4-408

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