Fabrication of polycrystalline silicon films by Al‐induced crystallization of silicon‐rich oxide films

E-ISSN： 1862-6270|10|9|668-672

ISSN： 1862-6254

Source： PHYSICA STATUS SOLIDI - RAPID RESEARCH LETTERS (ELECTRONIC), Vol.10, Iss.9, 2016-09, pp. : 668-672

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Annealing effects on silicon-rich oxide films studied by spectroscopic ellipsometry

By Spiga S. Tallarida G. Borghesi A. Sassella A. De Santi G.

Thin Solid Films, Vol. 325, Iss. 1, 1998-07 ,pp. : 36-41

Elsevier

Access to resources Recommend Favorite

The effects of ambient oxygen pressure on the 1.54 μm photoluminescence of Er-doped silicon-rich silicon oxide films grown by laser ablation of a Si+Er target

By Ha J.S. Sung G.Y. Lee S. Jang Y.R. Yoo K.H. Bae C.H. Jeon J.S. Nam S.H. Park S.M.

Applied Physics A, Vol. 79, Iss. 4-6, 2004-09 ,pp. : 1485-1488

Springer Publishing Company

Access to resources Recommend Favorite

Large area polycrystalline silicon thin films grown by laser-induced nucleation and solid phase crystallization

By Toet D. Koopmans B. Bergmann R.B. Richards B. Santos P.V. Albrecht M. Krinke J.

Thin Solid Films, Vol. 296, Iss. 1, 1997-03 ,pp. : 49-52

Elsevier

Access to resources Recommend Favorite

Fabrication and photoluminescence properties of Tb‐doped nitrogen‐rich silicon nitride films

PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Vol. 9, Iss. 10‐11, 2012-10 ,pp. : 2207-2210

John Wiley & Sons Inc

Access to resources Recommend Favorite

High concentration erbium doping of silicon-rich SiO 2 thin films on silicon

By Xu F. Xiao Z. Cheng G. Yi Z. Zhang T. Gu L. Wang X.

Thin Solid Films, Vol. 410, Iss. 1, 2002-05 ,pp. : 94-100

Elsevier

Access to resources Recommend Favorite