Annealing effects on silicon-rich oxide films studied by spectroscopic ellipsometry

Author: Spiga S.   Tallarida G.   Borghesi A.   Sassella A.   De Santi G.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.325, Iss.1, 1998-07, pp. : 36-41

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Abstract