Modeling and Fabrication of Micro FET Pressure Sensor with Circuits

Author: Dai Ching-Liang   Tai Yao-Wei   Kao Pin-Hsu  

Publisher: MDPI

E-ISSN: 1424-8220|7|12|3386-3398

ISSN: 1424-8220

Source: Sensors, Vol.7, Iss.12, 2007-12, pp. : 3386-3398

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Abstract