Author: Kim Jong-Wan Takao Hidekuni Sawada Kazuaki Ishida Makoto
Publisher: MDPI
E-ISSN: 1424-8220|7|8|1387-1398
ISSN: 1424-8220
Source: Sensors, Vol.7, Iss.8, 2007-07, pp. : 1387-1398
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Manufacture and Characterization of High Q-Factor Inductors Based on CMOS-MEMS Techniques
By Yang Ming-Zhi Dai Ching-Liang Hong Jin-Yu
Sensors, Vol. 11, Iss. 10, 2011-10 ,pp. :
Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique
By Kao Pin-Hsu Dai Ching-Liang Hsu Cheng-Chih Wu Chyan-Chyi
Sensors, Vol. 9, Iss. 8, 2009-08 ,pp. :
Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators
By Kao Pin-Hsu Shih Po-Jen Dai Ching-Liang Liu Mao-Chen
Sensors, Vol. 10, Iss. 2, 2010-02 ,pp. :