Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique

Author: Kao Pin-Hsu   Dai Ching-Liang   Hsu Cheng-Chih   Wu Chyan-Chyi  

Publisher: MDPI

E-ISSN: 1424-8220|9|8|6219-6231

ISSN: 1424-8220

Source: Sensors, Vol.9, Iss.8, 2009-08, pp. : 6219-6231

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract