Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs

Author: Shakoor Rana Iqtidar   Bazaz Shafaat Ahmed   Kraft Michael   Lai Yongjun   Masood ul Hassan Muhammad  

Publisher: MDPI

E-ISSN: 1424-8220|9|4|2389-2414

ISSN: 1424-8220

Source: Sensors, Vol.9, Iss.4, 2009-04, pp. : 2389-2414

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Abstract