Design and Characterization of a Fully Differential MEMS Accelerometer Fabricated Using MetalMUMPs Technology

Author： Qu Peng   Qu Hongwei  

Publisher： MDPI

E-ISSN： 1424-8220|13|5|5720-5736

ISSN： 1424-8220

Source： Sensors, Vol.13, Iss.5, 2013-05, pp. : 5720-5736

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