Challenges in the Assembly and Handling of Thin Film Capped MEMS Devices

Author： Zaal Jeroen J. M.   van Driel Willem D.   Zhang G.Q.  

Publisher： MDPI

E-ISSN： 1424-8220|10|4|3989-4001

ISSN： 1424-8220

Source： Sensors, Vol.10, Iss.4, 2010-04, pp. : 3989-4001

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