A Z-Axis Quartz Cross-Fork Micromachined Gyroscope Based on Shear Stress Detection

Author： Xie Liqiang   Wu Xuezhong   Li Shengyi   Wang Haoxu   Su Jianbin   Dong Peitao  

Publisher： MDPI

E-ISSN： 1424-8220|10|3|1573-1588

ISSN： 1424-8220

Source： Sensors, Vol.10, Iss.3, 2010-03, pp. : 1573-1588

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