Effect of the Detector Width and Gas Pressure on the Frequency Response of a Micromachined Thermal Accelerometer

Author： Garraud Alexandra   Combette Philippe   Courteaud Johann   Giani Alain  

Publisher： MDPI

E-ISSN： 2072-666x|2|2|167-178

ISSN： 2072-666x

Source： Micromachines, Vol.2, Iss.2, 2011-05, pp. : 167-178

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