Micromachined Resonators: A Review

Author: Abdolvand Reza   Bahreyni Behraad   Lee Joshua E. -Y.   Nabki Frederic  

Publisher: MDPI

E-ISSN: 2072-666x|7|9|160-160

ISSN: 2072-666x

Source: Micromachines, Vol.7, Iss.9, 2016-09, pp. : 160-160

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Abstract