Implementation of the CMOS MEMS Condenser Microphone with Corrugated Metal Diaphragm and Silicon Back-Plate

Author: Huang Chien-Hsin   Lee Chien-Hsing   Hsieh Tsung-Min   Tsao Li-Chi   Wu Shaoyi   Liou Jhyy-Cheng   Wang Ming-Yi   Chen Li-Che   Yip Ming-Chuen   Fang Weileun  

Publisher: MDPI

E-ISSN: 1424-8220|11|6|6257-6269

ISSN: 1424-8220

Source: Sensors, Vol.11, Iss.6, 2011-06, pp. : 6257-6269

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract