A Novel Integrated Multifunction Micro-Sensor for Three-Dimensional Micro-Force Measurements

Author： Wang Weizhong Zhao Yulong Qin Yafei

Publisher： MDPI

E-ISSN： 1424-8220|12|4|4051-4064

ISSN： 1424-8220

Source： Sensors, Vol.12, Iss.4, 2012-03, pp. : 4051-4064

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Abstract

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