A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the Friction in MEMS Bearings

Author： Liu Huan   Yang Shuming   Zhao Yulong   Jiang Zhuangde   Liu Yan   Tian Bian  

Publisher： MDPI

E-ISSN： 1424-8220|13|10|13178-13191

ISSN： 1424-8220

Source： Sensors, Vol.13, Iss.10, 2013-09, pp. : 13178-13191

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