Monolithic Composite “Pressure + Acceleration + Temperature + Infrared” Sensor Using a Versatile Single-Sided “SiN/Poly-Si/Al” Process-Module

Author: Ni Zao   Yang Chen   Xu Dehui   Zhou Hong   Zhou Wei   Li Tie   Xiong Bin   Li Xinxin  

Publisher: MDPI

E-ISSN: 1424-8220|13|1|1085-1101

ISSN: 1424-8220

Source: Sensors, Vol.13, Iss.1, 2013-01, pp. : 1085-1101

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Abstract