Identification of Capacitive MEMS Accelerometer Structure Parameters for Human Body Dynamics Measurements

Author： Benevicius Vincas   Ostasevicius Vytautas   Gaidys Rimvydas  

Publisher： MDPI

E-ISSN： 1424-8220|13|9|11184-11195

ISSN： 1424-8220

Source： Sensors, Vol.13, Iss.9, 2013-08, pp. : 11184-11195

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