A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process

Author： Merdassi Adel   Yang Peng   Chodavarapu Vamsy P.  

Publisher： MDPI

E-ISSN： 1424-8220|15|4|7349-7359

ISSN： 1424-8220

Source： Sensors, Vol.15, Iss.4, 2015-03, pp. : 7349-7359

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