Wafer-Level Hybrid Integration of Complex Micro-Optical Modules

Author： Dannberg Peter   Wippermann Frank   Brückner Andreas   Matthes Andre   Schreiber Peter   Bräuer Andreas  

Publisher： MDPI

E-ISSN： 2072-666x|5|2|325-340

ISSN： 2072-666x

Source： Micromachines, Vol.5, Iss.2, 2014-06, pp. : 325-340

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