Performance Characterization of Micromachined Inductive Suspensions Based on 3D Wire-Bonded Microcoils

Author： Lu Zhiqiu   Poletkin Kirill   Wallrabe Ulrike   Badilita Vlad  

Publisher： MDPI

E-ISSN： 2072-666x|5|4|1469-1484

ISSN： 2072-666x

Source： Micromachines, Vol.5, Iss.4, 2014-12, pp. : 1469-1484

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