Design and Fabrication of Interdigital Nanocapacitors Coated with HfO2

Author: González Gabriel   Kolosovas-Machuca Eleazar Samuel   López-Luna Edgar   Hernández-Arriaga Heber   González Francisco Javier  

Publisher: MDPI

E-ISSN: 1424-8220|15|1|1998-2005

ISSN: 1424-8220

Source: Sensors, Vol.15, Iss.1, 2015-01, pp. : 1998-2005

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Abstract