Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry

Author： Vidal-Álvarez Gabriel Marigó Eloi Torres Francesc Barniol Núria

Publisher： MDPI

E-ISSN： 2072-666x|7|3|40-40

ISSN： 2072-666x

Source： Micromachines, Vol.7, Iss.3, 2016-03, pp. : 40-40

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