Self-alignment in the stacking of microchips with mist-induced water droplets

By Chang Bo   Sariola Veikko   Jääskeläinen Mirva   Zhou Quan  

Journal of Micromechanics and Microengineering, Vol. 21, Iss. 1, 2011-01 ,pp. : 15016-15026

IOP Publishing

Access to resources Recommend Favorite

Advanced Capillary Soft Valves for Flow Control in Self-Driven Microfluidics

By Hitzbleck Martina   Delamarche Emmanuel  

Micromachines, Vol. 4, Iss. 1, 2013-01 ,pp. : 1-8

MDPI

Access to resources Recommend Favorite

Self-Assembly of Microscale Parts through Magnetic and Capillary Interactions

By Morris Christopher J.   Isaacson Brian   Grapes Michael D.   Dubey Madan  

Micromachines, Vol. 2, Iss. 1, 2011-03 ,pp. : 69-81

MDPI

Access to resources Recommend Favorite

Oxide-Oxide Thermocompression Direct Bonding Technologies with Capillary Self-Assembly for Multichip-to-Wafer Heterogeneous 3D System Integration

By Fukushima Takafumi   Hashiguchi Hideto   Yonekura Hiroshi   Kino Hisashi   Murugesan Mariappan   Bea Ji-Chel   Lee Kang-Wook   Tanaka Tetsu   Koyanagi Mitsumasa  

Micromachines, Vol. 7, Iss. 10, 2016-10 ,pp. : 184-184

MDPI

Access to resources Recommend Favorite

Self-Assembly of Chip-Size Components with Cavity Structures: High-Precision Alignment and Direct Bonding without Thermal Compression for Hetero Integration

By Fukushima Takafumi   Konno Takayuki   Iwata Eiji   Kobayashi Risato   Kojima Toshiya   Murugesan Mariappan   Bea Ji-Chel   Lee Kang-Wook   Tanaka Tetsu   Koyanagi Mitsumasa  

Micromachines, Vol. 2, Iss. 1, 2011-02 ,pp. : 49-68

MDPI

Access to resources Recommend Favorite