Effect of Rapid Thermal Annealing on the Structural Evolution and Electrical Property of Gold Films Deposited on Silicon

Publisher: Trans Tech Publications

E-ISSN: 1662-9795|2017|730|97-101

ISSN: 1013-9826

Source: Key Engineering Materials, Vol.2017, Iss.730, 2017-03, pp. : 97-101

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Abstract