Reduction of Defects in AlGaN Grown on Nanoscale-Patterned Sapphire Substrates by Hydride Vapor Phase Epitaxy

Author： Tasi Chi-Tsung   Wang Wei-Kai   Tsai Tsung-Yen   Huang Shih-Yung   Horng Ray-Hua   Wuu Dong-Sing  

Publisher： MDPI

E-ISSN： 1996-1944|10|6|605-605

ISSN： 1996-1944

Source： Materials, Vol.10, Iss.6, 2017-05, pp. : 605-605

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