Investigations of AlGaN/GaN MOS-HEMT with Al2O3 deposition by ultrasonic spray pyrolysis method

Publisher: IOP Publishing

E-ISSN: 1361-6641|30|1|15009-15015

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.30, Iss.1, 2015-01, pp. : 15009-15015

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