Dual-frequency capacitively coupled chlorine discharge

Author： Huang Shuo   Gudmundsson J T  

Publisher： IOP Publishing

E-ISSN： 1361-6595|24|1|15003-15014

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.24, Iss.1, 2015-02, pp. : 15003-15014

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