Effects of reactor geometry and frequency coupling on dual-frequency capacitively coupled plasmas

Author: Bi Zhen-Hua   Dai Zhong-Ling   Zhang Yu-Ru   Liu Dong-Ping   Wang You-Nian  

Publisher: IOP Publishing

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.22, Iss.5, 2013-10, pp. : 55007-55014

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content