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Author: Han Seungyong Hong Sukjoon Wanit Manorokul Kang Bongchul Han Seungyong Han Seungyong
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|10|105006-105013
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.10, 2015-10, pp. : 105006-105013
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Abstract
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