Miniature proportional control valve with top-mounted piezo bimorph actuator with millisecond response time

Author: Groen Maarten S   Brouwer Dannis M   Lötters Joost C   Wiegerink Remco J  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|10|105008-105018

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.10, 2015-10, pp. : 105008-105018

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Abstract