Design Considerations for a Micromachined Proportional Control Valve

Author： Groen Maarten S.   Brouwer Dannis M.   Wiegerink Remco J.   Lötters Joost C.  

Publisher： MDPI

E-ISSN： 2072-666x|3|2|396-412

ISSN： 2072-666x

Source： Micromachines, Vol.3, Iss.2, 2012-04, pp. : 396-412

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