Author: Yi Peiyun Shu Yunyi Deng Yujun Peng Linfa Lai Xinmin
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|10|105017-105029
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.10, 2015-10, pp. : 105017-105029
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
By Wang Jin Yi Peiyun Deng Yujun Peng Linfa Lai Xinmin Ni Jun
Journal of Micromechanics and Microengineering, Vol. 25, Iss. 11, 2015-11 ,pp. :
By Deng Yujun Yi Peiyun Peng Linfa Lai Xinmin Lin Zhongqin
Journal of Micromechanics and Microengineering, Vol. 24, Iss. 4, 2014-04 ,pp. :