Author: Deng Yujun Yi Peiyun Peng Linfa Lai Xinmin Lin Zhongqin
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|6|65004-65014
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.6, 2015-06, pp. : 65004-65014
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Abstract
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