Investigation of gap-closing interdigitated capacitors for electrostatic vibration energy harvesting

Author： Oxaal John Foster Daniel Hella Mona Borca-Tasciuc Diana-Andra

E-ISSN： 1361-6439|25|10|105010-105018

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.10, 2015-10, pp. : 105010-105018

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