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Investigation of gap-closing interdigitated capacitors for electrostatic vibration energy harvesting

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Out-of-plane electret-based MEMS energy harvester with the combined nonlinear effect from electrostatic force and a mechanical elastic stopper

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Journal of Micromechanics and Microengineering, Vol. 25, Iss. 10, 2015-10 ,pp. : 104014-104024

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Experimental investigation of snap-through motion of in-plane MEMS shallow arches under electrostatic excitation

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Sub-micron gap in-plane micromechanical resonators based on low-temperature amorphous silicon thin-films on glass substrates

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