Shock reliability analysis and improvement of MEMS electret-based vibration energy harvesters

Author： Renaud M Fujita T Goedbloed M de Nooijer C van Schaijk R

E-ISSN： 1361-6439|25|10|104010-104018

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.10, 2015-10, pp. : 104010-104018

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