![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
Author: Tao Kai Liu Shuwei Miao Jianmin Hu Xiao
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.6, 2014-06, pp. : 65022-65032
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Related content
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
By Tao Kai Miao Jianmin Tang Lihua Hu Xiao Tao Kai
Journal of Micromechanics and Microengineering, Vol. 25, Iss. 10, 2015-10 ,pp. :
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)