Fabrication and characterization of suspended beam structures for SiO2 photonic MEMS

Author: Peters Tjitte-Jelte   Tichem Marcel  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|10|105003-105010

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.10, 2015-10, pp. : 105003-105010

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract