Author: Xiao D B Li Q S Hou Z Q Wang X H Chen Z H Xia D W Wu X Z
Publisher: IOP Publishing
E-ISSN: 1361-6439|26|2|25005-25014
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.26, Iss.2, 2016-02, pp. : 25005-25014
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Abstract
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