A novel sandwich differential capacitive accelerometer with symmetrical double-sided serpentine beam-mass structure

Author: Xiao D B   Li Q S   Hou Z Q   Wang X H   Chen Z H   Xia D W   Wu X Z  

Publisher: IOP Publishing

E-ISSN: 1361-6439|26|2|25005-25014

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.26, Iss.2, 2016-02, pp. : 25005-25014

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