Characterization of an annular helicon plasma source powered by an outer or inner RF antenna

Author： Zhang Yunchao   Charles Christine   Boswell Rod  

Publisher： IOP Publishing

E-ISSN： 1361-6595|25|1|15007-15015

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.25, Iss.1, 2016-02, pp. : 15007-15015

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