Alternative nano-structured thin-film materials used as durable thermal nanoimprint lithography templates

Author： Bossard M   Boussey J   Drogoff B Le   Chaker M  

Publisher： IOP Publishing

E-ISSN： 1361-6528|27|7|75302-75315

ISSN： 0957-4484

Source： Nanotechnology, Vol.27, Iss.7, 2016-02, pp. : 75302-75315

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